The S onix is an areal interferometer that is perfect for industrial environments due to its astonishing speed and resolution.
- FOV (single shot) > 5.0 × 3.8 mm
- Acquisition time 3 s
- Optical resolution < 190 nm
- Measurement noise < 1 nm
Image Credit: Sensofar Metrology
Unprecedented Speed
The S onix offers the speed required for a high-throughput industrial metrology system. With the high-speed camera and improved optical and mechanical design, the S onix is the quickest interferometric system. Measurement noise is retained with the benefit of enhanced resistance against vibration.
Image Credit: Sensofar Metrology
Objective Lens
Table 1. Source: Sensofar Metrology
| |
Interferometric |
| Magnification |
2.5X |
5X |
10X |
20X |
50X |
100X |
| NA |
0.075 |
0.13 |
0.30 |
0.40 |
0.55 |
0.70 |
| WD (mm) |
10.3 |
9.3 |
7.4 |
4.7 |
3.4 |
2.0 |
| FOV1 (µm) |
5040 x 3780 |
2520 x 1890 |
1260 x 945 |
630 x 472 |
252 x 189 |
126 x 94 |
| Spatial sampling2 (µm) |
7.88 |
3.94 |
1.97 |
0.98 |
0.39 |
0.19 |
| Optical resolution3 (µm) |
7.62 |
3.81 |
1.91 |
0.95 |
0.38 |
0.23 |
| Vertical resolution4 (nm) |
1 |
| Maximum slope5 (º) |
3 |
8 |
14 |
21 |
25 |
42 |
System Specifications
Table 2. Source: Sensofar Metrology
| . |
. |
| Measuring principle |
CSI |
| Measurement types |
Image, 3D and 3D thickness |
| Camera |
640 x 480 pixels |
| Vertical scan range |
Linear stage: 40 mm range; 2 nm resolution |
| Max. Z measuring range |
7 mm |
| LED light sources |
White (575 nm)and green (532 nm) |
| Nosepiece |
1 position (default) or 6 manual position (optional) |
| Sample reflectivity |
0.05 % to 100% |
| Advanced Software Analysis |
Inc: SensoVIEW; Op: SensoPRO, SensoMAP |
| Software communication |
DLL (C++ or C#, Windows 10® - 64 bits)
XML (any operating system) |
| Computer |
Latest INTEL processor |
| Operating system |
Microsoft Windows 10®, 64 bit |
| Cable Length |
5, 15 or 20 m |
| Environment |
Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <2000 m |
1 Maximum field of view with 1/3” camera and 0.375X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for green LED. Spatial sampling could limit the optical resolution. 4 Measurement noise measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment. 5 On smooth surfaces.
Dimensions
Image Credit: Sensofar Metrology