Integrable Metrology 3D Sensors - S onix

The S onix is an areal interferometer that is perfect for industrial environments due to its astonishing speed and resolution.

  • FOV (single shot) > 5.0 × 3.8 mm
  • Acquisition time 3 s
  • Optical resolution < 190 nm
  • Measurement noise < 1 nm

Integrable Metrology 3D Sensors

Image Credit: Sensofar Metrology

Unprecedented Speed

The S onix offers the speed required for a high-throughput industrial metrology system. With the high-speed camera and improved optical and mechanical design, the S onix is the quickest interferometric system. Measurement noise is retained with the benefit of enhanced resistance against vibration.

Integrable Metrology 3D Sensors

Image Credit: Sensofar Metrology

Objective Lens

Table 1. Source: Sensofar Metrology

Magnification 2.5X 5X 10X 20X 50X 100X
NA 0.075 0.13 0.30 0.40 0.55 0.70
WD (mm) 10.3 9.3 7.4 4.7 3.4 2.0
FOV1 (µm) 5040 x 3780 2520 x 1890 1260 x 945 630 x 472 252 x 189 126 x 94
Spatial sampling2 (µm) 7.88 3.94 1.97 0.98 0.39 0.19
Optical resolution3 (µm) 7.62 3.81 1.91 0.95 0.38 0.23
Vertical resolution4 (nm) 1
Maximum slope5 (º) 3 8 14 21 25 42


System Specifications

Table 2. Source: Sensofar Metrology

. .
Measuring principle CSI
Measurement types Image, 3D and 3D thickness
Camera 640 x 480 pixels
Vertical scan range Linear stage: 40 mm range; 2 nm resolution
Max. Z measuring range 7 mm
LED light sources White (575 nm)and green (532 nm)
Nosepiece 1 position (default) or 6 manual position (optional)
Sample reflectivity 0.05 % to 100%
Advanced Software Analysis Inc: SensoVIEW; Op: SensoPRO, SensoMAP
Software communication DLL (C++ or C#, Windows 10® - 64 bits)
XML (any operating system)
Computer Latest INTEL processor
Operating system Microsoft Windows 10®, 64 bit
Cable Length 5, 15 or 20 m
Environment Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <2000 m


1 Maximum field of view with 1/3” camera and 0.375X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for green LED. Spatial sampling could limit the optical resolution. 4 Measurement noise measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment. 5 On smooth surfaces.


Integrable Metrology 3D Sensors

Image Credit: Sensofar Metrology

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