Photoresist ExactaCoat system from Sono-Tek
This video shows the Photoresist ExactaCoat system from Sono-Tek. This coating is the best solution for Photoresist coating onto MEMS wafers and other 3D microstructures. This Photoresist coating with ultrasonic spray is shown to have advantages over conventional spin coating in depositing a more have advantages such as uniform coating, particularly along the top section of side walls of trenches and v-grooves structures where centrifugal spin makes it impossible to deposit.
Run time – 0:49sec