Alicona’s MeX Turns SEM into a True Surface Metrology Device

In this video, the efficiency of Alicona’s MeX to turn any SEM with digital imaging into a true surface metrology device is demonstrated.

MeX is a stand-alone software package capable of turning the SEM into a fully operational 3D measurement device. Metric analysis such as profile, area and even volumetric measurements are feasible. MeX is SEM independent and requires only images to produce results. The operator captures a stereoscopic image by a simple use and tilting of the specimen. With a known tilt angle, the image magnification, and the working distance, the surface of the specimen is automatically reconstructed. The resulting 3D model can be viewed in all dimensions and metric information is also available. Profiles can be directly measured on the reconstructed images. Height distance as well as roughness measurements can be attained.

Run Time - 0:55min

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