The Multi-Sensor Metrology Tool - MicroProf 200
Metrology Tool MicroProf® 200 measures a silicon wafer and a micro fluidic board with different optical sensors to determine firstly the wafer thickness and secondly the depth and width for micro channels. As the most sought-after FRT device, the MicroProf® 200 offers contact-free and non-destructive characterisations of nearly all surfaces and layers. Its robust design and its highly reliable and long-lasting components make it suitable for non-stop deployment in every industrial environment. The customisable multi-sensor design and broad portfolio of optional extensions, the MicroProf® 200 not only solves all current metrology tasks but is prepared for all future challenges. And all this comes with intuitive and easy handling.