The KLA MicroXAM100 Profilometer and Interferometer
The MicroXam100 from KLA is a surface profilometer and white light optical interferometer. Jim Zobel explains how the system works and demsinatres it's fast data acquisition rates.
Data from the MicroXam100 can be used to determine:
- Surface roughness
- Step heights
- As well as other calculations on surface features
It can also be used to build up 3D data/images and can cater for large samples.
Run time - 3:03min