The KLA Tencor MicroXAM100 Profilometer and Interferometer

The MicroXam100 from KLA Tencor is a surface profilometer and white light optical interferometer. Jim Zobel explains how the system works and demsinatres it's fast data acquisition rates.

Data from the MicroXam100 can be used to determine:

  • Surface roughness
  • Step heights
  • As well as other calculations on surface features

It can also be used to build up 3D data/images and can cater for large samples.

Run time - 3:03min

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