AIXTRON SE announced that it has delivered a Close Coupled Showerhead® (CCS) reactor in the second quarter of 2013 to the University of Illinois at Urbana-Champaign, USA.
The 3x2" system will be used for the development of III-V compound semiconductor based materials and devices, including nanowire based solar cells and transistors. AIXTRON received the order in the fourth quarter of 2012.
"We needed a flexible research platform that can support a variety of programs at the University. The critical issues for us are cost of ownership and process flexibility, which is essential for materials research in a multi-user environment,” says Professor Xiuling Li from the Department of Electrical and Computer Engineering and Micro and Nanotechnology Laboratory (MNTL) at Illinois.
The MNTL at Illinois contains more than 8,000 square feet of Class 100 and Class 1000 cleanroom space and recently underwent an US $18 million expansion that added faculty and student office space.
AIXTRON AG is a leading provider of deposition equipment to the semiconductor industry. The Company's technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and opto-electronic applications based on compound, silicon, or organic semiconductor materials and more recently carbon nanostructures.
Such components are used in display technology, signal and lighting technology, fiber communication networks, wireless and cell telephony applications, optical and electronic data storage, computer technology as well as a wide range of other high-tech applications.