AIXTRON SE announced today that King Abdullah University of Science and Technology (KAUST) has ordered an AIX BM plasma-enhanced chemical vapor deposition system for growth of graphene and carbon nanotubes.
The reactor capable of handling 4-inch substrates will be delivered in the third quarter of 2014.
Professor Pedro Da Costa leads the team that will be using the equipment at the KAUST
Laboratory for Carbon Nanostructures. “We plan to expand our research in this rapidly
growing field with the aim of finding a wide range of new applications,” reports Da Costa. “To
support our work, we need the best performing commercial reactor for high quality carbon
nanomaterials and have thus selected AIXTRON’s world-leading BM Pro reactor.”
“We are delighted about the first order from KAUST. Our BM Pro system is based upon the
showerhead, vertical flow concept which delivers both uniformity and scalability, rapid
heating and plasma-based processing to successfully grow mono and multi-layer graphene
and various types of nanotubes at low cost of ownership and maintenance”, says Dr. Frank
Schulte, Vice President AIXTRON Europe.
We are delighted about the first order from KAUST.
Dr. Frank Schulte - Vice President AIXTRON EUROPE
The AIXTRON BM system range supports substrate diameters from 50 mm (2-inch) up to
300 mm. Proprietary showerhead, heater and plasma technology ensures users to benefit
from high uniformity, scalability, repeatability and excellent film quality.
AIXTRON SE is a leading provider of deposition equipment to the semiconductor industry. The Company was founded in 1983 and is headquartered in Herzogenrath (near Aachen), Germany, with subsidiaries and sales offices in Asia, United States and in Europe. AIXTRON’s technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and opto-electronic applications based on compound, silicon, or organic semiconductor materials. Such components are used in a broad range of innovative applications, technologies and industries. These include LED applications, display technologies, data storage, data transmission, energy management