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Graphenea Increases Capacity with AIXTRON BM Pro

AIXTRON's graphene production technology impresses with scalability, maximum throughput and excellent uniformity

AIXTRON SE, a worldwide leading provider of deposition equipment to the semiconductor industry, today announced a new order for a BM Pro system from Spanish company Graphenea, one of the world’s leading suppliers of graphene and related materials.

Graphenea’s focus is in developing graphene-based films for use in the semiconductor industry.

AIXTRON’s BM Pro system, now in its 3rd generation, has been specifically optimized for high quality graphene deposition with Graphenea’s tool having the highest throughput to date. Graphenea placed the order for the 8-inch configuration deposition system during the first quarter of 2016.

The tool is scheduled for delivery later this year which will be followed by the installation and commissioning of the system by AIXTRON’s European support team.

Our existing AIXTRON BM Pro system has been a reliable workhorse in producing graphene for our needs. In taking the graphene to the next level, we chose an AIXTRON BM Pro tool again because of its scalable technology which addresses our graphene production needs of even higher throughput and larger areas.

Also, the system meets our requirements of high temperature operation, combined with excellent uniformity. System flexibility, low maintenance, automatic recipe execution and process support were other compelling reasons for selecting AIXTRON again.

Dr. Amaia Zurutuza - Scientific Director, Graphenea

This new system is part of our large investment program to introduce graphene technology in commercial devices. Our focus is to integrate graphene materials in CMOS (complementary metal-oxide-semiconductor) fabs starting with 8-inch wafers and 12-inch in the near future.

Jesus de la Fuente - CEO, Graphenea

Graphenea, a leading company in graphene production and venture backed by oil company Repsol and CDTI (Centre for the Development of Industrial Technology), was established in 2010, and has since grown to be one of the world's largest providers of graphene.

The company is headquartered at the nanotechnology cluster CIC nanoGune in San Sebastian, Spain and the Massachusetts Institute of Technology (MIT) campus near Boston. The company has focused on constant improvement of graphene quality, becoming a supplier customers can rely on.


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