Herzan is excited to announce the latest release from Spicer Consulting: the SC28 monitoring system.
SC28 Monitoring Software
Image Credit: Herzan
The SC28 enables longterm, uninterrupted monitoring of magnetic fields, vibrations, and acoustic noise – as well as temperature and humidity – within the lab and semiconductor fab. This system is intentionally-designed to monitor the environment for electron beam instruments, including Scanning Electron Microscopes (SEM), Transmission Electron Microscopes (TEM), Electron Beam Lithography tools, and SEM-based metrology and inspection tools.
What's In the Box
The SC28 utilizes high-performance sensors and monitoring hardware to deliver a clear and comprehensive understanding of the environment being measured.
SC28 Monitoring Software
Image Credit: Herzan
Monitoring System: SC28/SI AC/DC
Sensors: Sensor SC24/DC+AC and Sensor SC11/AC
Acoustic Microphone: Brüel & Kjær 4190 microphone
Vibration Sensors: Wilcoxon 731A accelerometers (three)
Temperature/Humidity Sensor: Sensor SC28/TH
Unique Features
SC28 Monitoring Software
Image Credit: Herzan
Purposefully Designed: Long term environmental monitoring for electron beam instruments
Complete Environmental Monitoring: continuously measure magnetic fields, floor vibration (X, Y, and Z), acoustic levels at 2kHz, and temperature/humidity at 1Hz or below
Completely Visual: up to 14 different graphs may be displayed simultaneously
Comprehensive Acquisition: Acquires sensor data and logs spectra and charts to date-stamped files
Headless: can run without user interface open