News - 8 Oct 2007
Nanoimprint lithography (NIL) has developed into a key technique for the fabrication of polymer nanopatterns and three-dimensional (3D) nanostructures. At its core, NIL is a simple nanometer scale...
News - 19 Jul 2007
At SEMICON West, Entegris, Inc. introduced an advanced bulk gas purification system that allows manufacturers to purify large volumes of purge gases used in dry and immersion-based lithography tools,...
News - 14 Jul 2007
Cadence Design Systems, Inc., the leader in global electronic-design innovation, today announced that it has acquired Invarium, Inc., a San Jose-based developer of advanced lithography-modeling and...
News - 15 Sep 2005
Mitsui Chemicals, Inc. (MCI) today announced development of a high refractive index liquid (“Delphi”) for next-generation immersion lithography1 in photolithographic processing2 for...
Article - 13 Aug 2007
Carl Zeiss NTS is a leading imaging supplier serving the global nanotechnology manufacturing and testing equipment markets.
News - 2 Dec 2013
USHIO INC., (President and CEO: Shiro Sugata) today announced that the company installed one unit of a projection aligner dedicated to developing 2.5D glass substrate at the Georgia Tech 3D Systems...
News - 7 Apr 2010
Maskless Lithography, Inc., a Silicon Valley startup led by a group of industry veterans, today came out of stealth mode with a brand new direct-write digital imaging technology that will raise the...
News - 24 Feb 2010
The eBeam Initiative, a forum dedicated to the education and promotion of a new design-to-manufacturing approach known as design for e-beam (DFEB), today announced that six additional companies...
News - 23 Jun 2009
To address the challenges of wafer polishing at future technology nodes, Peter Wolters GmbH, a wholly-owned subsidiary of Novellus Systems (NASDAQ:NVLS), has recently developed advanced polishing...
News - 14 Jul 2009
HamaTech Advanced Process Equipment (APE) GmbH + Co. KG, today announced its most advanced photomask processing system, the MaskTrack Pro, which extends the technology of HamaTech's highly...