The VeraSpec Atmospheric Pressure Ionization Mass Spectrometer (APIMS) from Extrel has been engineered for repeatable and reliable low parts-per-trillion detection limits. This helps control contamination in Ultra-High Purity (UHP) gases that are used in high-tech industrial applications, such as semiconductors and others.
Listed below are the major benefits of using VeraSpec APIMS for controlling contamination in the UHP gases:
- Unmatched measurement range from PPT to 100% with exclusive dual-source ionization configuration, integrating both electron impact and atmospheric pressure ionization sources
- Multi-species, real-time monitoring for critical impurities, such as O2, CO, H2O, NH3, CH4, CO2 and more
- User-friendly with a built-in user interface for point-of-use visual indicators on gas purity, effective operation and scheduled automated calibrations
- Robust, well-established mass spectrometry technology