By Cameron Chai
Voltaix has inked a contract with Air Liquide to build two new plants in South Korea and the US, in order to increase the production capacity of Trisilylamine (TSA).
Voltaix will construct the two new TSA production units at its modern manufacturing plants located in Yeongi-gun in South Korea and Upper Mount Bethel Township in the US, in order to meet worldwide market requirements and facilitate strong supply contingency.
Trisilylamine is a flexible silicon precursor molecule, which is utilized in different disruptive front-end semiconductor applications. TSA is used to manufacture advanced microprocessor and memory chips. TSA usage has been planned to grow sharply, when the size of the device reduces to the 20 nm technology node generations.
Voltaix’s new chemistry and process engineering knowledge will be incorporated to these new modern facilities, which may commence functioning over the subsequent 12 to 18 months. Air Liquide will expand its ultra-high purification potential at the ALOHA production centers and establish the quality control, handling and logistics infrastructure that are essential to support this growth.
According to the CEO of Voltaix, Peter Smith, the company can scale TSA manufacturing potential in order to satisfy the demands increasing in the semiconductor industry. Due to its unique properties, TSA can be used in many applications. The company is delighted to have Air Liquide as its partner with knowledge and experience in the expansion of ALD and CVD precursors and method, he stated.