All along the beam line there is plenty of potential for increasing the lifetime of consumables and simplifying their installation and replacement.
Plansee's range includes spare parts for all common systems that will save both time and money. One of the highlights this year is the Ideal Extraction. Improved design and modified material properties allow it to almost completely eliminate the "glitching effect".
This is arcing, caused by residual gas in the extraction assembly, which adversely affects acceleration of the ions.
Find out more about improved spare parts, from the shaftless cathode in the ion source to optimized designs and materials in mass resolution. Ideally, come and meet Plansee's ion implantation team in person at Semicon West 2013 in San Francisco between 9th and 11th July 2013. You will find Plansee at booth 623 in the South Hall.
OEM Extraction in an ion implanter. Image credit: Plansee.
Plansee High Performance Materials
Plansee High Performance Materials is an expert in the field of molybdenum, tungsten, tantalum, niobium and chromium components. Alloys and composite materials from Plansee come into their own in electronics, coating technology or high-temperature furnaces - wherever traditional materials are stretched beyond their limits.
Plansee manufactures thousands of different replacement parts from tungsten, molybdenum, tantalum, graphite and ceramics for ion implantation and other semiconductor applications, operating two centers of excellence in the United States and Japan.
Plansee manufactures products precisely according to the OEM standards of all major manufacturers worldwide, with a primary focus on the design of improved and enhanced performance systems.
Marketed under the "Plansee Advanced Standard" brand, replacement parts and upgrade solutions from Plansee are known throughout the semiconductor industry for their extended service life, simplified handling, lower maintenance expenditure, and reduced costs.
Plansee’s global sales force and international team of product engineers and designers are available for on-site consultation, to provide solutions for your ion implantation needs.