Feb 13 2004
ATK Inc, an Applied Materials company has released the AKT-40K PECVD (Plasma Enhanced Chemical Vapour Deposition) system for manufacturing the 7th generation of flat panel displays and monitors.
7th generation substrates are the largest and most advanced substrates to date. They are typically 1.8 x 2.2m in size and can produce up 8 x 40 inch panles or 6 x 46 inch panels per substrate. Their primary use is the production of flat panel displays are or Thin Film Transistor monitors, more commonly known as TFT-LCD monitors.
The ATK-40K can accommodate up to five process chambers, with an ability to process more then 60 substrates per hour. This makes it the fastest processing system on the market for this type of application.
The system is capable of depositing single layers or in situ multiple layer films of doped and undoped amorphous silicon, silicon oxide, silicon oxynitride and silicon nitride.
ATK has already received commitments from customers for multiple ATK-40K PECVD systems, which they hope begin shipping around the middle of the year.
For more information on displays, click here.