The Scientific Materials and Applied Research Tool (SMART) platform is a versatile deposition system that is engineered for today's thin films deposition research applications. The table top chamber can incorporate multiple deposition techniques including thermal evaporation sources, electron beam evaporation, sputter deposition, and pulsed laser deposition. The Ultra High Vacuum Deposition (UHV) configuration delivers a high purity environment for sensitive materials. The integrated control panel minimizes the laboratory footprint and provides convenient process control. Optional process monitoring techniques such asRHEED, quartz crystal monitor, and residual gas analyzer provide the researcher with real-time process information. The SMART Deposition System can be configured for a wide range of applications:
- Thin Film Deposition by evaporation or Sputter deposition
- Pulsed Laser Deposition
- Ohmic Contact Deposition and Annealing
- Ion Beam Etching