Posted in | Microscopy | Materials Analysis

Pushing SEM Microanalysis Beyond EDS with QUANTAX WDS

From Nov 7 2025
Pushing SEM Microanalysis Beyond EDS with QUANTAX WDS

While Energy Dispersive Spectrometry (EDS) remains a fast and convenient tool for SEM users, it can fall short when it comes to resolving spectral overlaps, detecting trace elements, and accurately measuring light elements.

In this on-demand webinar, you’ll see how Bruker’s QUANTAX WDS system addresses those limitations head-on. By leveraging the power of Wavelength Dispersive Spectrometry (WDS), it delivers significantly improved spectral resolution, enhanced detection sensitivity, and greater quantitative accuracy - opening up analytical possibilities well beyond what EDS alone can offer.

Point spectra and map (insert top right) of a semiconductor microsensor sample. EDS only detects Tantalum (and surface-adhering elements C and O). But QUANTAX WDS sees more: it also detects Si, derived from the substrate below the ~30 nm thick Ta layer.

Point spectra and map (insert top right) of a semiconductor microsensor sample. EDS only detects Tantalum (and surface-adhering elements C and O). But QUANTAX WDS sees more: it also detects Si, derived from the substrate below the ~30 nm thick Ta layer. Image Credit: Bruker

What You’ll Learn

  • How WDS improves upon EDS in resolution, accuracy, and sensitivity
  • Key advantages for trace and light-element analysis
  • How QUANTAX WDS resolves spectral overlaps with clarity

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