Verifire™ Asphere+: Flexible Metrology Platform

Aspheric optics provides many advantages in designing and implementing imaging, sensing, and laser systems used in industries ranging from defense and aerospace to semiconductor exposure and inspection systems and medical imaging systems.

Precision metrology is required for the production of aspheres that assist these applications. After all, one cannot create what one cannot measure in aspheric optics.

The VerifireTM Asphere+ (VFA+) takes advantage of the benefits of Fizeau interferometry to provide axisymmetric aspheres with a rare combination of accurate, high-resolution, quick, and full aperture metrology.

The VFA+ is a versatile metrology platform that can measure a variety of axisymmetric aspheres by simply changing the transmission sphere. The VFA+ has an optional secondary stage that supports a computer-generated hologram (CGH), which extends the asphere shape capacity to nonsymmetric freeforms and off-axis aspheric optics.

Users can simply set up new measurements, circumvent measurement data and results, and identify production issues while focusing on improving the user experience. With simple one-click setup, alignment, and measurement capabilities, MxTM Software allows effective R&D and prototyping phases and improves production applications.

Introduction to VFA+

Video Credit: Zygo Corporation

Other Features of the VFA+

  • Adaptable to multi-part automated optics tray measurement
  • Use as a “normal” Fizeau interferometer with an extremely accurate radius of curvature rail.
  • Upgrade existing VFA systems to VFA+ for a cost-effective asphere metrology solution that is future-compatible.

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