Wafer Handling Stages – Increase the Rate of Wafer Inspection Whilst Reducing Error

Wafer handling stages from Prior Scientific are engineered to be integrated with specially designed semiconductor wafer loaders, offered by Olympus and Nikon. This combination increases the wafer inspection rate, and reduces operator error and fatigue.

Automatic loading and unloading of wafers is possible, and the stage is designed to handle a wafer of up to 200 mm. The speed and repeatability of the stage is 40 mm/s and 0.2 µm, respectively.

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Key Features

The following are the key features of the wafer handling stages:

  • 0.2 µm repeatability
  • Travel range is 250 x 250
  • Can be integrated into specially designed wafer loaders available from Olympus (AL120 or Nikon (NWL200 and NWL860)

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