Voyager - Flexible PECVD Platform from Denton Vacuum

The addition of the Voyager to Denton Vacuum's range of deposition platforms provides the thin film specialist with the ability to deposit a variety of films previously difficult to produce due to the geometry of the part or the extended deposition period required. The Voyager utilizes proven hardware configurations developed by Denton Vacuum. The result is a robust mechanical package supported by established controls for ease of operation and intuitive recipe building.

Designed to meet the thin film industry’s requirements for conformal coatings, low temperature processing and high intrinsic uniformity, the Voyager offers Plasma Enhanced Chemical Vapor Deposition on a convenient platform.

Benefits of PECVD processes include an unlimited source of deposition material and the ability to produce defined stresses in the film.

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