PI Offers Surface Metrologists Increased Flexibility with Nanopositioners with Increased Travel

PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment semiconductor and photonics applications, has extended its PIHera® family of flexure-guided piezo nanopositioning stages, now offering record travel ranges to 1.8 mm.

New Stages Capture 200X Larger Areas than Conventional Stages

These precision closed-loop flexure-guided stages can be used for scanning probe applications (surface metrology) and static positioning. Due to the long travel ranges they can scan areas more than 200 times larger than conventional piezo stages with typical ranges of 100x100 µm. Most PIHera® stages provide sub-nanometer resolution and even the 1.8 mm versions achieve 3 nm resolution in closed-loop operation. The compact size is achieved with a new, friction-free and extremely stiff flexure system, which also provides fast response and excellent guiding accuracy. Trajectory precision is in the low-nanometer range. High acceleration forces are provided by patented, long-life multilayer piezoelectric linear actuators. The ability to control motion with millisecond responsiveness and nanometer precision over long travel ranges makes PIHera® stages ideal for measuring and QA applications.

Capacitive Feedback Offers Greater Motion Linearity

The stages are equipped with non-contact capacitive-sensors and provide extremely linear motion with up to 99.98% accuracy and effective resolution in the sub-nanometer range. PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.

Typical Applications

Surface Metrology, Quality Assurance, Scanning Probe Microscopy, Nanometrology, Interferometry, Nanopositioning, Nano-Alignment / Semiconductor Technology

Features & Advantages

  • No Wear & Tear: Flexures, Actuators and Sensors are Maintenance-Free
  • Longer Lifetime with Patented, Ceramic-Encapsulated Piezo Actuators
  • X, XY, Z and XYZ Versions Available
  • 50 to 1800 µm Travel Ranges, Nanometer Resolution
  • Closed-Loop Digital & Analog Control for Up to 99.98 % Position Accuracy
  • Vacuum-Compatible Versions
  • Stiff and Compact Design for Millisecond Responsiveness
  • Frictionless, Maintenance-Free, Precision Flexure Guiding System
  • Direct-Metrology Sensors for Faster Servo Response

Flexible Controllers: High Speed, Digital and Analog Control

A variety of ultra-low-noise controllers with both digital and analog input provide fast communications and come with a wide selection of software tools.

Citations

Please use one of the following formats to cite this article in your essay, paper or report:

  • APA

    PI (Physik Instrumente) LP. (2019, February 10). PI Offers Surface Metrologists Increased Flexibility with Nanopositioners with Increased Travel. AZoM. Retrieved on June 19, 2024 from https://www.azom.com/news.aspx?newsID=11418.

  • MLA

    PI (Physik Instrumente) LP. "PI Offers Surface Metrologists Increased Flexibility with Nanopositioners with Increased Travel". AZoM. 19 June 2024. <https://www.azom.com/news.aspx?newsID=11418>.

  • Chicago

    PI (Physik Instrumente) LP. "PI Offers Surface Metrologists Increased Flexibility with Nanopositioners with Increased Travel". AZoM. https://www.azom.com/news.aspx?newsID=11418. (accessed June 19, 2024).

  • Harvard

    PI (Physik Instrumente) LP. 2019. PI Offers Surface Metrologists Increased Flexibility with Nanopositioners with Increased Travel. AZoM, viewed 19 June 2024, https://www.azom.com/news.aspx?newsID=11418.

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Your comment type
Submit

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.