New High Load Piezo Linear Motors on Ceramic Runners for Nanopositioners from PI

PI (Physik Instrumente) L.P. introduces the new N-216 NEXLINE high-load piezo linear motors. These ultra-precision nanopositioning actuators provide travel ranges to 20 mm and push / pull forces to 600 N (130 lb). The operating principle is based on coordinated motion of a number of highly preloaded linear and shear piezo elements acting on a ceramic runner.

Features & Advantages

  • All-Ceramic Drive, Extreme Lifetime, No Lubricants
  • Direct Linear Motion, does not involve Rotation / Conversion
  • Non-Magnetic and Vacuum & Clean room Compatible Working Principle
  • Push / Pull Forces to 600 N /130 lbs
  • High Holding Forces, to 800 N / 177 lbs (Power Off, No Heat Generation!)
  • Travel Range 20 mm
  • Resolution to 0.03 nm (30 Picometers)
  • Self-Locking at Rest, No Heat Generation

Extreme Reliability, Virtually Unlimited Lifetime

NEXLINE PiezoWalk drives have many high-end applications from ultra-precision manufacturing and semiconductor test equipment to astronomy and high energy physics applications. They excel when tough requirements for lifetime, stability , precision and force are paramount. The extreme reliability makes them ideal for applications in difficult-to-access internals of instruments, where nanometer-realm adjustment and / or vibration cancellation are required. To promote long lifetime, the PiezoWalk controller can reduce the operating voltage on the piezo elements to zero at any position without affecting the full holding force (up to 800 N, 177 lbs).

PiezoWalk Working Principle Allows Different Operation Modes

The piezoceramic clamping and shear elements act directly on a moving runner coupled to the load. For maximum velocity, and long distance movements, the runner can be driven in full step mode. Extremely uniform motion and constant velocity is achieved with the nanostepping mode. In addition to combining long travel ranges with piezo-class precision, NEXLINE PiezoWalk drives also offer a high-dynamics analog operation mode (100's of Hz) over smaller distances (to 6 µm).

Open & Closed Loop Operation

N-216 linear motors come in two versions for open- or closed-loop operation, as well as in two different load configurations. Closed-loop versions are equipped with a linear encoder for direct position measurement of the moving runner. The encoder features 5 nm resolution over the full travel range. In open-loop operation a positioning resolution to 30 picometers can be realized by use of the (high-dynamics) analog operation mode.

Choice of Controllers
NEXLINE operation is supported by two motion controller models providing different features. The (lower-cost) E-755 controller offers full functionality for nanometer precise positioning. The E-712 supplies more sophisticated linearization algorithms resulting in very smooth motion with highly constant velocity and offers greater flexibility by nature of its modular design.

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