Posted in | Materials Analysis

Black Silicon Research At Anhalt University Enhanced Using Oxford Instruments Systems

The Anhalt University of Applied Sciences based in Köthen, Germany recently purchased an Oxford Instruments PlasmaPro® System100 ICP 65 tool to undertake PV research in the field of crystalline silicon solar cells using Black Si processes.

Oxford Instruments Plasma Technology has developed a number of processes for the production of photovoltaics using our flexible tools and with key technologies. The PlasmaPro System100 ICP 65 is ideal for this type of research, with key features including an extended process temperature range from cryo to up to 400ºC, and the possibility to upgrade ICP-CVD technology at a later point of time.

Comments Prof. Dr. Bernhard from Anhalt University, “A maskless silicon dry etch process can be used to texturise the surface of a silicon substrate to create Black-Si. The reduced reflectivity provides greater potential for light trapping in the cells. Using a dry etch process to create the surface texture is independent of the crystal structure of the silicon substrate and can be applied to one side of the wafer. We chose the PlasmaPro System as it offers all the capabilities we require for our research.”

“The proven versatility of the Oxford Instruments PlasmaPro System100 tool made it the ‘system of choice’ for Anhalt University’s Black Si PV research using tuned etch processes”, says Mark Vosloo, Sales, Marketing and CS Director, Oxford Instruments Plasma Technology. “Our cutting-edge equipment provides a sound basis for applied academic research, and we pride ourselves on being involved in providing process solutions for the micro- and nanometre engineering of materials for many applications including PV.”

About Oxford Instruments plc

Oxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. It provides solutions needed to advance fundamental physics research and its transfer into commercial nanotechnology applications. Innovation has been the driving force behind Oxford Instruments' growth and success for over 50 years, and its strategy is to effect the successful commercialisation of these ideas by bringing them to market in a timely and customer-focused fashion.

The first technology business to be spun out from Oxford University over fifty years ago, Oxford Instruments is now a global company with over 1900 staff worldwide and is listed on the FTSE250 index of the London Stock Exchange (OXIG). Its objective is to be the leading provider of new generation tools and systems for the research and industrial sectors.

This involves the combination of core technologies in areas such as low temperature, high magnetic field and ultra high vacuum environments, Nuclear Magnetic Resonance, X-ray, electron and optical based metrology, and advanced growth, deposition and etching.

Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. Its products, expertise, and ideas address global issues such as energy, environment, security and health.

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