The Journal of Vacuum Science
and Technology A is devoted to reports of original research, review articles,
and Critical Review articles. JVST A will include topics such as:
- Applied surface science
- Electronic materials and processing
- Fusion technology
- Plasma technology
- Surface science
- Thin films
- Vacuum metallurgy, and
- Vacuum technology.
The Journal of Vacuum Science
& Technology offers ground-breaking editorial covering applications
in semiconductors (particularly thin films), plasmas, surfaces and properties
and processing of electronic materials.
JVST readers include engineers, physicists, chemists, material and microelectronic
scientists, technologists and other specialists working in all branches of microelectronic
and thin film materials processing.
The Journal of Vacuum Science
and Technology A is available online.