Omega/Theta XRD
Fully Automated Vertical Three-Axes X-Ray Diffractometer for Ultra-Fast Crystal Orientation
The Omega/Theta XRD achieves an unparalleled combination of precision and speed in determining crystal lattice orientation.
Providing results in as little as ten seconds, this XRD system comes equipped with various process accessories, including barcode readers and crystal stacking frames.
It can handle a diverse range of samples, accommodating weights of up to 30 kg and lengths of up to 450 mm. As a dependable partner, it facilitates the transfer of measured orientation data to the users’ processing tool.
Image Credit: Malvern Panalytical Ltd
Overview
The Omega/Theta XRD stands as the steadfast and future-proof ally for determining crystal orientation in the ever-evolving semiconductor landscape. It blends market-leading precision, rapid measurement speed, and top-notch build quality with the strength of automation, ensuring the processes remain adaptable.
With unmatched efficiency and precision for crystal orientation and alignment, the Omega/Theta XRD proves ideally suited for both production and research applications.
Image Credit: Malvern Panalytical Ltd
Features and Benefits
Ultra-Fast Precision With Proprietary Scan Technology
The approach requires just one full sample rotation to collect all the essential data for a comprehensive orientation determination, ensuring high precision within a very brief measuring time—typically in the range of a few seconds.
Easy Interfacing for Advanced Connectivity and Automated Measurements
All measurements conducted on the Omega/Theta XRD are automated and controlled through the user-friendly XRD software. The instrument seamlessly integrates into existing production processes in production environments, utilizing SECS/GEM or other MES.
Characterize a Range of Materials
Omega/Theta XRD is applicable for characterizing all single-crystalline materials. Some commonly utilized materials include:
- Si
- Ge
- GaN
- GaAs
- AIN
- SiC
- CdTe
- BBO
- LiNbO3
- Quartz
Convenient, Flexible Sample Handling
The extensive array of accessories boosts the productivity of the Omega/Theta XRD across a broad spectrum of applications, ranging from seed boring and grinding to slicing and wafer geometry end control. This ensures flexibility, even as user needs evolve over time. Additional components include:
- Automatic stage for mapping crystal orientation quality or surface distortions on a user-defined grid
- Rocking curve tool for quality measurement
- Additional sample rotation axis
- Stacking stage for aligning up to 12 ingots on the same sawing beam
- Photographic camera and image processing
- Sample adjustment equipment
- Numerous other custom engineering solutions!
- Laser scanner for sample shape measurement
Featuring tailored sample holders designed to fulfill requirements ranging from large ingots to tiny cylinders, the Omega/Theta XRD can adapt to a diverse array of sample sizes. This versatility ensures its seamless integration into both production workflows and research environments.
Key Applications
Production
Crafted with manufacturers in mind, the Omega/Theta XRD excels in the rapid orientation and alignment of diverse crystal types within production processes. Whether marking in-plane directions or verifying the orientation of flats or notches, it proves ideal for production quality control, offering high throughput speeds and automation capabilities.
Optional extras, such as a stacking stage for aligning up to 12 ingots before sawing and a rocking curve tool for quality measurements, further enhance the versatility of the Omega/Theta XRD as a reliable partner for production applications.
Materials Research
The Omega/Theta XRD, known for its high precision and flexibility, proves ideal for materials research. It can accommodate samples up to 30 kg and 450 mm in length, with additional stages available for larger or more complex samples. With the capability to characterize a diverse range of materials, it becomes highly valuable for users’ R&D processes. The flexible Theta Scan functionality further expands the realm of measurement possibilities.
Specification
Source: Malvern Panalytical Ltd
| . |
. |
| Throughput |
10000+ Wafer per Month |
| Wafer geometry |
On request |
| Tilt precision |
0.003 |
| XRD axis vs notch / flat position |
0.03 ° |