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Ellipsometry is a versatile and powerful optical technique for the investigation of the dielectric properties (complex refractive index or dielectric function) of thin films. It has applications in many different fields, from semiconductor physics to microelectronics and biology, from basic research to industrial applications. Ellipsometry is a very sensitive measurement technique and provides unequalled capabilities for thin film metrology. As an optical technique, spectroscopic ellipsometry is non-destructive and contactless.
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Featured Equipment
Semilab offers a unique modular optical platform, the SE-2000, which includes a spectroscopic ellipsometer with rotating compensator optics.
Other Equipment
The FilmTek™ 2000SE is a high performance spectroscopic ellipsometer for thin film characterization that measures from the deep UV to NIR (190-1700nm). Based on a rotating compensator design, the FilmTek™ 2000SE spectroscopic ellipsometer combines spectroscopic ellipsometry with multiple angle reflectometry to make it ideally suited for measuring the thickness and optical constants (n & k) of very thin films.
The spectroscopic ellipsometer SENpro represents a new generation of cost effective spectroscopic ellipsometers featuring simple operation, measurement speed and combined data analysis of ellipsometric measurements at single or multiple angle of incidence.
The UVISEL 2 available from HORIBA Scientific is a fully integrated and automated ellipsometer which has been specifically designed for industrial and research-oriented users.
EP5, EP12 and EP20 tools from Semilab are based on Ellipsometric porosimetry (EP) having various degree of automation and wafer size capabilities. EP measures the change of the optical properties and thickness of the materials during adsorption and desorption of either an organic solvent or water at reduced pressure.
The Alpha SE™ is the newest addition to the JA Woollam line of ellipsometers. This new ellipsometer is designed to make SE measurements as fast and simple as possible. The Alpha-SE™ will measure both thickness and index with the use of the Alpha-SE software. With the compact, fully integrated design and USB connection make the ultimate table top tool.
The SE 500adv can be operated as a laser ellipsometer, film thickness probe FTPadv or as a Combined Ellipsometry and Reflectometry (CER) ellipsometer. As a result, it offers maximum flexibility never reached by standard laser ellipsometers.
The PT-5 panel tester Gen5 is designed to measure properties of thin film solar cells that meet the GEN-5 standard. It incorporates an ellipsometer, a non-contact resistivity mapper and a haze meter.
HORIBA Scientific has unveiled the Smart SE Spectroscopic Ellipsometer which is a powerful, versatile and cost-effective instrument for quick and precise thin film measurements.
The GES5E is the SOPRA core instrument for R&D applications. GES5E integrates advanced and well proven opto-mechanical designs coupled to high performance electronics, Spectrometers and spectrographs and user friendly Windows software. GES5E is the most recent model of 5 generations of spectroscopic ellipsometers developed by SOPRA.
The SENresearch broadband spectroscopic ellipsometer family is designed to meet the requirements of modern research with special emphasis on speed and accuracy for an unmatched variety of applications.
UNECS-3000A is an advanced, ultra-fast spectroscopic ellipsometer that uses snap shot measurement technique with automated mapping to measure optical and thickness parameters of thin films.