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Plasmas generated by RF, DC, microwave and pulsed methods are used both in research and industrial applications to produce such things as semiconductors. To ensure the process is accurate and repeatable plasma dignotic toools are used to measure and characterise plasma parameters such as density, uniformity and electron temperature of the plasma.
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The EQP mass spectrometer combines an electrostatic sector energy analyser with a high performance quadrupole mass filter in an instrument designed for plasma diagnostics. The EQP can acquire the mass spectra and energy distributions of neutrals, radicals and ions (positive and negative). Trends in intensity can be plotted against time. Fast acquisition modes mean that transients and afterglows can be studied.