Air Liquide to Triple Silane Production Capacity to Meet the Needs of Semiconductor and Flat Panel Display Manufacturers

Silane (monosilane, SiH4) is a high purity gas that has become a key material in the manufacture of semiconductors, flat panel displays and photovoltaic solar cells. In a global market growing at more than 25% per year, Air Liquide is today the world leader with more than 35% market share. This leadership is based on a strong expertise in the complete supply chain from silane production to specialized filling centers and dedicated logistics to meet the highest standards of the industry. In particular, Air Liquide has been producing ultra pure silane since 1987, in association with the Denka Group through Denal, its joint-venture company in Japan.

Following the expansion in capacity to over 500 tons per year of Ultra Pure Silane in Omi, Japan, announced last year, Air Liquide and Denka have decided to launch a new large initiative with the construction of a world scale unit in Japan to meet the growing demand of the market. With this additional silane unit, Air Liquide’s total manufacturing capacity will more than triple with extension-ready capability to 2,000 tons per year in a further step. The unit will be operational by 2010, and will reinforce Air Liquide’s leadership for this product in Japan, throughout Asia, and the rest of the world.

Air Liquide is also strengthening its distribution and service capabilities worldwide with the opening of three new Electronics Materials Centers this year in Japan, Taiwan, and China together with investment in many containers for its distribution fleet.

Christophe Fontaine, Vice President Electronics Group declared: "With this new project, Air Liquide, the only gas supplier to manufacture silane, again demonstrates its commitment to secure reliable supply to its customers. This strategic investment, complementing our new Electronics Material Centers in Asia, as well as our Jumbo™ bulk silane offer, will confirm our global leadership in Ultra Pure Silane and accelerate our growth in the pure gases market.”

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