Oxford
Instruments Plasma Technology (OIPT), a leading manufacturer of high
technology tools and systems, has recently received multiple orders with a total
value of over £3.5M for its advanced Plasmalab®System133 cluster tool. These
systems will be used for the deposition of Diamond Like Carbon (DLC) - a process
used in the manufacture of power devices.
DLC coatings have the right electrical resistivity to make high power
semiconductors work at ever higher voltages and OIPT was one of the first
companies to prove this process in 1995, successfully transferring the process
from the laboratory to large scale production. OIPT’s range of production tools
offer excellent uniformity, reproducibility and high-throughput processes,
offering both single wafer or cassette load wafer handling options with
integrated process control, making them ideally suited for this application.
The power semiconductor industry for automotive, industrial electronics,
robotics and process automation demands chips which can carry more power, with
greater reliability.
Mark Vosloo, Oxford Instruments Plasma Technology’s Sales Director comments,
‘Our many years of expertise in the DLC process based on our System133 cluster
tool, ensures that we can meet demanding customer requirements. The company’s
proven process capability and reliable tailor made solutions, for these and many
other challenging processes and market applications, is the reason we are the
manufacturer of choice for these customers.’