SENTECH offers leading edge ellipsometers for thin film metrology and plasma equipment for etching and deposition.
The SENresearch family represents the high end of SENTECH spectroscopic ellipsometers and includes the unique combination of FTIR (Fourier Transform Infrared) spectroscopy and multiplex diode array spectrometry for spectroscopic ellipsometry.
The SENresearch ellipsometer family makes use of both spectroscopy techniques and the step scan analyser principle for detection and offers the widest spectral range ellipsometry, the highest resolution, and best signal-to-noise ratio.
The big advantage of multiplex detection is speed, by this making the SENresearch ellipsometers the fastest and most flexible ellipsometers available.
To fulfil the high requirements of our customers SENTECH improved the SENresearch FTIR ellipsometer to measure faster in the NIR, offering highest spectral resolution and widest spectral range with excellent signal-to-noise-ratio in shorter measurement time.
SENresearch spectroscopic ellipsometers measure more than 1000 pairs of (Ψ, Δ) between 240-2500 nm in less than 10 s applying ultrafast FTIR spectroscopic ellipsometry. This means 10 times faster measurements compared to state of the art solutions.
In addition to increasing measurement speed, we have expanded the spectral range as far as 2500 nm. The lower limits are 190 nm with Deuterium-Halogen light source and MgF2 optics, 240 nm with Deuterium-Halogen light source and quartz optics, and 380 nm with Halogen light source.
Get your quote for SENTECHs wide range ultrafast spectroscopic ellipsometer now by contacting SENTECH.