SC Ultra High Performance Magnetic Sector SIMS from CAMECA

The CAMECA SC Ultra has been specifically designed to meet the increasing needs for dynamic SIMS measurements in advanced semiconductors.

The design of the CAMECA SC Ultra is quite unique: along with the CAMECA IMS Wf, it is the only SIMS instrument offering EXtreme Low Impact Energy capabilities with no compromise on high mass resolution and high transmission.

As SIMS technique matures, users want to reduce the expertise required to achieve high reproducibility and high precision measurements. The trend is clearly toward unattended, automated analysis. The CAMECA SC Ultra faces this challenge with its large sample holder to load batches of several tens of samples, and with its computer automation controlling all analytical paramaters (analysis recipe, instrument set-up, etc...).

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