SC Ultra has been specifically designed to meet the increasing needs for
dynamic SIMS measurements in advanced semiconductors.
The design of the CAMECA
SC Ultra is quite unique: along with the CAMECA IMS Wf, it is the only SIMS
instrument offering EXtreme Low Impact Energy capabilities with no compromise
on high mass resolution and high transmission.
As SIMS technique matures, users want to reduce the expertise required to achieve
high reproducibility and high precision measurements. The trend is clearly toward
unattended, automated analysis. The CAMECA
SC Ultra faces this challenge with its large sample holder to load batches
of several tens of samples, and with its computer automation controlling all
analytical paramaters (analysis recipe, instrument set-up, etc...).