Oxford Instruments Plasma Technology has received an order from the Hanwha Group’s Santa Clara entity for its PlasmaPro System100 multi chamber cluster tool. The cluster tool consists of a combination of sputter modules and PECVD. The tool will be installed at the Advanced PV Research Laboratory of Hanwha Solar America in Santa Clara, California.
The PlasmaPro System100 multi chamber cluster tool will enable Hanwha Solar to perform research on novel cell concepts, materials and characterization of processes that are associated with the development of crystalline silicon solar cells.
Oxford Instruments America’s VP, Stuart Mitchell, stated that the Hanwha Solar order highlighted its position as a supplier of R&D equipment for academic organizations worldwide.
Hanwha Solar America’s Lab Director, Dr. Paul Basore announced that the establishment of the advanced research and development center for photovoltaics study formed part of the company’s worldwide R&D network. Hanwha selected Oxford for its expertise, products and global support, he added.
Oxford Instruments Plasma Technology provides configurable processes and process tools for performing accurate, repeatable and controllable engineering of nano-structures. It also manufactures plasma etch and deposition tools. Hanwha Solar America is a Hanwha Holdings subsidiary, which aims to set up R&D centres for advanced photovoltaic solar technology in the Silicon Valley.
Source: http://www.oxford-instruments.com/