The Hiden differentially pumped PSM plasma probe provides measurement of the key parameters required for establishing the reaction chemistry of diverse plasma and pulsed-plasma processes.
The integrated quadrupole mass spectrometer (QMS) and Bessel-box energy analyser generate detailed diagnostics identifying positive plasma ion species and intensities, and ion energies within a +/- 100eV energy window. The system additionally operates as a conventional QMS for measurement of gas species and for leak detection.
The axial symmetry ensures a compact assembly requiring a minimal space envelope, with differential pumping enabling operation with - process pressures from 10E-4mbar to 2mbar.
Programmable time-resolved signal gating with incremental timing delay have gate width and gate delay adjustable down to a minimum of just 100 nanoseconds. This facility, together with the systems data accumulation mode, proves ideally suited for intimate detailing of pulsed plasma profiles and general time-variant studies.
PSM systems are available with mass range options in excess of 1000amu. Alternative systems offer analysis of both positive and negative ions, and an ion energy range of +/-1000eV.