Semplor Introduces ONYX, the Largest- Stage Tabletop SEM

Semplor has launched ONYX, a new tabletop scanning electron microscope (SEM) designed to give laboratories greater flexibility when working with large or multiple samples and higher-throughput workflows.

With a 110 × 110 mm motorized sample stage, ONYX offers the largest sample stage of any tabletop SEM. The spacious stage can accommodate up to 64 half- inch SEM sample stubs, 16 one-inch stubs, or larger samples such as semiconductor wafers, with samples up to 50 mm in height. This allows users to prepare and analyze multiple samples in a single setup, reducing the need to repeatedly load and unload samples during analysis.

High-Performance Imaging and Analysis

ONYX combines high-resolution SEM imaging with secondary electron (SE) and four-quadrant backscattered electron (BSE) detection, delivering detailed surface information, compositional contrast and mixed-mode imaging.

With a resolution of < 8 nm and accelerating voltages from 1 to 20 kV, ONYX supports a broad range of imaging applications, including high-resolution imaging, low-kV imaging and imaging of non-conductive samples in low-vacuum mode.

An embedded energy dispersive spectroscopy (EDS) detector extends the system’s capabilities beyond imaging. Semplor’s Discover EDS software combines SEM imaging, elemental analysis and reporting in a single interface, supporting point analysis, line scans and elemental mapping. The EDS system provides an energy resolution of < 129 eV and a detectable element range from B (5) to Am (95).

Built Around Efficient Workflows

The ONYX platform is designed to make SEM analysis straightforward, from sample loading through to results. Its intuitive software brings imaging and analysis together in a single user interface, while features such as a motorized stage and integrated navigation camera support efficient sample handling and positioning.

The system also includes a user-replaceable electron source, designed to minimize downtime and simplify maintenance.

For applications requiring more advanced material characterization, optional Semplor Explore Apps add integrated particle, fiber and 3D analysis to the ONYX workflow. These tools allow users to extract quantitative information directly from SEM images without moving to separate analysis software.

Advanced SEM in a Compact Tabletop Format

Despite its large sample capacity, ONYX retains a compact tabletop footprint of 420× 605 × 625 mm. The system is designed to provide high-performance SEM imaging and elemental analysis without the infrastructure requirements typically associated with larger floor-standing instruments.

This makes ONYX suitable for a wide range of R&D, industrial, research and education applications, including the analysis of particles, fibers, mining materials, semiconductors, metals and other advanced materials.

Key ONYX Specifications

  • < 8 nm SEM resolution
  • 110 × 110 mm motorized XY stage
  • Up to 64 × 1/2-inch or 16 × 1-inch SEM sample stubs
  • Samples up to 50 mm in height
  • 1–20 kV accelerating voltage
  • Secondary electron and four-quadrant BSE detectors
  • Embedded EDS with < 129 eV energy resolution
  • Detectable elements from B to Am
  • High-vacuum and low-vacuum imaging
  • User-replaceable electron source
  • Integrated SEM imaging and EDS analysis software
  • Optional particle, fiber and 3D analysis

ONYX is available through Semplor’s distributor network.

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