Semplor has introduced NANOS EBSD, a tabletop scanning electron microscope (SEM) with integrated Electron Backscatter Diffraction (EBSD) capability, bringing crystallographic analysis into a compact and intuitive SEM platform.
NANOS EBSD combines high-resolution SEM imaging with EBSD and EDS analysis, enabling users to investigate not only what a sample looks like, but also how its microstructure is organized. EBSD provides information on crystal orientation, phase and grain structure, while the integrated EDS system adds elemental analysis within the same platform.
A key feature of NANOS EBSD is its eucentric tilt stage, which tilts the sample from 0 ° to 70 ° while keeping the region of interest centered and in focus. This creates a direct and reproducible workflow between SEM imaging and EBSD analysis: users can identify an area of interest in the normal imaging position and bring that same area into the EBSD position without breaking vacuum or repositioning the sample.
From Imaging to Crystallographic Insight
NANOS EBSD provides high-resolution SEM imaging with a resolution of < 8 nm and accelerating voltages from 1 to 20 kV. Secondary electron and four-quadrant backscattered electron detectors support detailed surface imaging and compositional contrast, while the embedded EDS detector enables elemental point analysis, line analysis and mapping.
For crystallographic analysis, the system integrates the Bruker e-Flash XS EBSD detector with Bruker ESPRIT software. The software provides automated and semi-automated signal optimization and pattern indexing, together with tools for orientation mapping, phase identification, grain reconstruction, grain boundary analysis, misorientation analysis and crystallographic texture analysis.
Multithreaded processing enables EBSD data to be reindexed at speeds of up to 60,000 points per second, supporting rapid analysis of crystallographic information across a sample.
A Seamless SEM–EBSD Workflow
The eucentric tilt stage is designed specifically to simplify the transition between imaging and EBSD. At the 70 ° EBSD position, the region of interest remains centered while field of view, working distance and focus are maintained.
This means that an area identified during SEM imaging can be brought directly into the correct position for EBSD analysis, without breaking vacuum or manually relocating the sample. The result is a workflow that is fast, intuitive and highly reproducible.
The same platform can also be used for EDS analysis, allowing users to switch between imaging, elemental and crystallographic analysis without moving the sample to a separate instrument.
Advanced Analysis in a Compact Platform
Despite integrating three complementary analytical techniques, NANOS EBSD retains the compact footprint of a tabletop SEM. The system measures approximately 280 × 470 × 550 mm and weighs 62 kg, making it suitable for laboratories where space and infrastructure are important considerations.
The system includes high- and low-vacuum SEM modes, a motorized X/Y stage, optical navigation and a fully integrated workstation. Low-vacuum operation at 40 Pa can help reduce charging when working with non-conductive samples.
NANOS EBSD is suited to applications where understanding a material’s microstructure and crystallographic properties is essential, including materials research, metallurgy, failure analysis, semiconductors and advanced manufacturing.
Key NANOS EBSD Specifications
- < 8 nm SEM resolution
- 100–200,000× SEM magnification range
- 1–20 kV accelerating voltage
- Eucentric tilt stage from 0 ° to 70 °
- Bruker e-Flash XS EBSD detector
- Up to 60,000 EBSD points/s reindexing
- Integrated Bruker ESPRIT software
- Embedded EDS with < 132 eV energy resolution
- Secondary electron and four-quadrant BSE detectors
- Motorized X/Y stage
- High- and low-vacuum SEM modes
- Compact 280 × 470 × 550 mm footprint
NANOS EBSD is available through Semplor’s distributor network.