High Vacuum and Load-Lock Probe Station for Semiconductors Added to Lake Shore Cryogenics Product Line

Lake Shore Cryotronics, Inc. Desert Cryogenics Division is pleased to introduce the addition of both a high vacuum and load-lock probe station to its line of cryogenic, superconducting magnet-based, and electromagnet-based probe stations.

The new Model HVTTP6 provides vacuum to 10-7 torr, minimizing condensation accumulation in the sample environment during cool down. This is critical for measuring organic semiconductors and for high-Z and low current measurement applications.

The new Model LLTTP6 provides load-lock capability, allowing sample exchange without warming the vacuum chamber or breaking vacuum. This significantly improves efficiency and throughput by reducing cycle time to roughly one hour, as well as reduces cryogen consumption. The load-lock also allows samples to be exchanged under controlled environmental conditions.

The Model HVTTP6 operates over a temperature range from 4.2 K to 475 K. With options, the base temperature can be extended to 2 K. It can be configured with up to six ultra-stable micro-manipulated probe arms and accommodates up to a 2-inch diameter wafer. The Model LLTTP6 operates over a temperature range from 10 K to 400 K, and can be configured with up to six ultra-stable micro-manipulated probe arms. It accommodates wafers up to 2 inches in diameter when top loaded, or 0.5 inches in diameter using the load-lock assembly. Both probe stations may also be operated with liquid nitrogen to a base temperature of 80 K.

The new HVTTP6 and LLTTP6 probe stations are ideal for measuring electrical, electro-optical, parametric, high-Z, DC, RF, and microwave properties of materials and test devices. Nanoscale electronics, quantum wires and dots, and semiconductors are typical materials measured. A wide selection of probes, cables, sample holders, and options makes it possible to configure the probe stations to meet your specific measurement applications.

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