SC3500 Evaporation System from Semicore

The SC3500 evaporation system from Semicore is made of stainless steel and is a water cooled process chamber with swing open front access door. The height is 60 inch and diameter 40 inch. It includes a cryogenic high vacuum package.

Key Features

The key features of the SC3500 evaporation system are:

  • Integrated deposition rate or process controller with recipe control and data logging
  • Has a multi-pocket electron beam evaporation source(s) for sequential or co-evaporation
  • Includes an ion source for ion beam assisted deposition (IBAD) and substrate pre-cleaning
  • Custom or standard substrate fixture that may be a rotating/tilting holder, optical planetary, lift-off dome or any other
  • Includes a IR substrate heater array up to 450°C

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