The latest Advanced, Magnetron Sputtering System Model SC450 from Semicore is a cost-effective high performance highly reliable instrument.
Semicore is an established designer and manufacturer of precision Thin Film Vacuum Deposition systems and products. The company’s design initiatives and engineering capabilities contribute effectively to the capabilities, quality and necessary economy of the innovative Magnetron Sputtering system.
The Model SC450 can accommodate a number of substrate sizes/shapes, and has an active decomposition area up to 200 mm (8”) diameter. It is designed with a completely automatic integrated controls, and multiple process gas capability.
The main features of the SC450 are as follows:
- Research and development prototyping
- Co-deposition or sequential modes
- Little volume, quick cycle processing
- Multiple sources up to four
- Magnetron sources: 50 mm (2”), 75 mm ( 3”), or 100 mm (4”)
- Integral cathode shutter
- Substrate; cooling, heating, RF/DC bias
- In-situ cathode tilt
- Confocal cathode arrangement
- HF RF or MF RF, DC, pulse DC power supplies
- Advanced FastCycle Load-lock is also provided
Semicore Equipment, Inc. has supplied compact laboratory magnetron sputtering system (SC-450) that we use in our R&D work in the field of optical sensors. We worked closely together with Semicore engineers to define and customization the equipment to best fit our current and possible further needs. The engineering staff was very knowledgeable about the related components, system, and software. They provided fast and exhaustive support before and after installation. The system is well built from engineering perspective, safe, and easy to use. I look forward to do more business with this company.
Dr. Denis Donlagic, Faculty of Electrical Engineering and Computer Science, University of Maribor