Cryogen Cooled, Low-Vibration Probe Stations

The ST-500 series probe stations from Janis are high-performance research tools manufactured to provide cost-effective vacuum and cryogenic probing of wafers and systems.

The well-established ST-500 cryostat forms the base for these probe stations, and includes low vibration technology to provide exceptional sample positional stability. Researchers rely on these systems to perform research in numerous fields such as ferroelectrics, MEMS, superconductivity, nanoscale electronics, optics, and material sciences.

Key Features

The main features of the ST-500 probe stations are:

  • Temperature range from ~3.5K to 475K (optional: 8K-650K) (based on probes used)
  • Low vibration level and positional drift
  • Can work with either liquid helium or liquid nitrogen
  • Helium consumption less than 1liter/hour
  • Up to seven cooled, easily interchangeable, micro-manipulated probe arms
  • Can hold up to 2” (51mm) diameter wafers (optional: up to 8” [203mm])
  • Electrical measurements from DC-67GHz
  • Broad range of economical LF probe tips that are easy to substitute
  • Extremely low triaxial probe arms leakage current of just a few fA
  • Multi-tip probes
  • Non-destructive, non-contact Kelvin probes
  • System customization options
  • Smooth X-Y-Z- travel stages for all monoscope unit assemblies
  • Fiber probe arms with single and multi-mode fiber options
  • Optional optical access via the sample mount for transmission measurements
  • Supplementary electrical feedthroughs with wires and cables to sample area
  • Optional special tiny vacuum chamber to transfer sample under vacuum from glove box to probe station
  • Optional movable chuck.

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