ST-500 series probe stations from Janis are high-performance research tools manufactured to provide cost-effective vacuum and cryogenic probing of wafers and systems.
The well-established ST-500 cryostat forms the base for these probe stations, and includes low vibration technology to provide exceptional sample positional stability. Researchers rely on these systems to perform research in numerous fields such as ferroelectrics, MEMS, superconductivity, nanoscale electronics, optics, and material sciences.
The main features of the ST-500 probe stations are:
Temperature range from ~3.5K to 475K (optional: 8K-650K) (based on probes used)
Low vibration level and positional drift
Can work with either liquid helium or liquid nitrogen
Helium consumption less than 1liter/hour
Up to seven cooled, easily interchangeable, micro-manipulated probe arms
Can hold up to 2” (51mm) diameter wafers (optional: up to 8” [203mm])
Electrical measurements from DC-67GHz
Broad range of economical LF probe tips that are easy to substitute
Extremely low triaxial probe arms leakage current of just a few fA
Non-destructive, non-contact Kelvin probes
System customization options
Smooth X-Y-Z- travel stages for all monoscope unit assemblies
Fiber probe arms with single and multi-mode fiber options
Optional optical access via the sample mount for transmission measurements
Supplementary electrical feedthroughs with wires and cables to sample area
Optional special tiny vacuum chamber to transfer sample under vacuum from glove box to probe station
Optional movable chuck.