The ZMI Series Displacement Measuring Interferometers

ZYGO, a leader in technology and application support in heterodyne displacement interferometry, provides complete solutions and support for OEM metrology application with its ZMI™ Series Displacement Measuring Interferometers. The company’s OEM products and technologies have been field proven for a number of years of use in leading-edge production facilities.

Key Features

The key features of the ZMI™ series are as follows:

  • Heterodyne displacement interferometry
  • A single laser source capable of supporting multiple axes
  • Easy to align, highly stable, and insensitive to signal amplitude changes
  • High signal to noise phase measurements enable high precision and remove false counts, even at zero slew rates
  • Highly robust for OEM applications

Typical Applications

The typical applications of the ZMI™ series are as follows:

  • Calibration: Measurement and calibration of high frequency or high resolution mechanical motions
  • Lithography tools: e-beam and laser mask writers, optical steppers and scanners
  • Process equipment: probers, memory repair tools, drilling tools, and die bonders
  • Metrology tools: Wafer, mask, and LCD measurement and inspection tools, and CD-SEMs

Configure the system to suit specific needs:

ZYGO offers a variety of

  • Laser heads
  • Interferometers and optics
  • Measurement electronics
  • Cables and feedthroughs

This modular approach enables the user to configure a system that ideally suits their requirements by selecting the most appropriate components.

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