Nexview™ 650 Metrology System for Large Format Inspection and Metrology

The Nexview 650 metrology system is an inspection tool for automated measurement of injection molding tooling, PCBs, glass panels, and other samples that require an extended work volume of up to 650 x 650 mm. It offers 2D and 3D measurements of various surface features with sub-micron lateral precision and sub-nanometer vertical precision.

Powerful Performance

The measurement technology at the core of the Nexview 650 system is Coherence Scanning Interferometry (CSI).

This non-contact technique offers high-precision, high-value surface metrology perks, including the following:

  • Measures almost any surface, from rough to very smooth, including thin films, steep slopes, and enormous steps.
  • Sub-nanometer measurement precision is independent of field magnification
  • Gage-capable performance offers excellent reliability and reproducibility for even the most demanding manufacturing applications.
  • SureScan vibration tolerance technology enables reliable operation in almost any environment.
  • Mx software allows for data sharing with other ZYGO profilers such as ZeGage Pro, NewView 9000, and Nexview NX2.

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