ECI Technology’s dosing experience of more than 15 years enables the QUALI-DOSE® systems to provide the most novel and comprehensive solutions for handling chemistries in existing Advanced Packaging applications.
The QUALI-DOSE system combines with QUALI-FILL® analyzers from ECI Technology to create a comprehensive online chemical management system—the most robust tool available for facilitating stringent chemical process control.
The QUALI-DOSE system uses smart, versatile algorithms and modes to make up, replenish, or bleed and feed the tank. Powered by quick, efficient dosing, the QUALI-DOSE systems generate no waste and avoid the need for regular maintenance.
Thanks to a system that can offer precise dosing with verification of all the critical components, users can enjoy an unparalleled level of convenience and reliability for running their plating process.
Key Features
- Flexible dosing options are available based on:
- Wafer count
- Analysis results
- Tank level
- Amp/minute
- Concentration levels of target or other components
- Time-based
- All crucial components can be dosed:
- DI water
- Inorganics
- Organics
- Feed and bleed (optional)
- Virgin makeup solution (VMS)
- Automatic standard generation (ASG)*
- Avoids frequent chemical handling and mixing
- Avoids the need to buy high cost standard
- Minimizes CoO, labor and maintenance
- Automatic validation—positive feedback with confirmation of each delivery
- Works in compliance with the industry safety standards: CE SEMI and S2/S8
- Supports multiple tanks, plating tools, and chemistries
- Manual mode for any component
- Can be combined with ECI QUALI-FILL® analyzers or used individually
- Includes NOWPak® reagent delivery system
- Can be combined with pressurized and automated central chemical bulk and blending systems
*Chemistry-dependent
Key Benefits
- Multiple delivery validations
- Accuracy of <3%
- Supports multiple tanks
- Extensive range of flow rates from 20 mL/minute to 5000 mL/minute
- Analyzer-controlled or operates independently
- Multiple dosing modes: dose to target, manual, feed-forward, feedback, time-based, amp/hour, wafer count, etc.
- Automatic verification with bar code eliminates human error
- Recipes provided for new bath make up and replenishment
- Any number of components can be dosed
- Handles bath dump or bleed and feed
- Ability to dose directly from pressurized chemical bulks (central chemical distribution systems)
- Integrates through buffer tank, slip-stream, or direct injection methods
Smaller process variability when using an ECI QUALI-DOSE system
Greater process variability when using an alternative doser
Image Credit: ECI Technology
Technical Specifications
- Dimensions—1829 mm (72″) W x 2061 mm (81.1″) H x 610 mm (24.0″) D
- Compliance standards: CE, SEMI F47, SEMI S2-S8, NFPA 79
- Data communication—Multiple communication protocols such as SECS/GEM, Serial, RS-232 and TCP/IP
- AC—180 to 245 VAC, 50/60 Hz, 15 A