Oxford Instruments Installs and Commissions PlasmaPro NGP80 RIE Etch System in the London Centre for Nanotechnology (LCN)

Oxford Instruments, a leader in plasma etch and deposition equipment and processes, has recently installed and commissioned a PlasmaPro NGP80 RIE etch system in the London Centre for Nanotechnology (LCN) for use in their research.

The PlasmaPro NGP80 is a compact, small footprint system that is easy to site and operate, without compromising on process quality. It can process from the smallest wafer pieces to 200mm wafers, while the open load design allows fast wafer loading and unloading, ideal for the research being undertaken at LCN.

Steve Etienne, Cleanroom Manager of the LCN commented, “The LCN is a multidisciplinary enterprise operating at the forefront of science and technology, whose purpose is to solve global problems in information processing, healthcare, energy and environment through the application of nanoscience and nanotechnology. We chose the Oxford Instruments tool for our research programme as the excellent technical specification suited our requirements, and in addition, the well founded reputation of their processing tools is backed up by expert specialist support.”

“We are very excited that our systems are being used in medical research at the LCN“, commented Mark Vosloo, Sales, CS and Marketing Director for Oxford Instruments Plasma Technology, “Oxford Instruments’ large Process Applications and Technology teams constantly research to innovate and offer new processes on our portfolio of advanced plasma etch and deposition processes and techniques. Through focusing on our customers’ current and future needs, Oxford Instruments is able to provide leading process solutions, maintained through our excellent global support network.”

About Oxford Instruments plc

Oxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. It provides solutions needed to advance fundamental physics research and its transfer into commercial nanotechnology applications. Innovation has been the driving force behind Oxford Instruments' growth and success for over 50 years, and its strategy is to effect the successful commercialisation of these ideas by bringing them to market in a timely and customer-focused fashion.

The first technology business to be spun out from Oxford University over fifty years ago, Oxford Instruments is now a global company with over 1900 staff worldwide and is listed on the FTSE250 index of the London Stock Exchange (OXIG). Its objective is to be the leading provider of new generation tools and systems for the research and industrial sectors.

This involves the combination of core technologies in areas such as low temperature, high magnetic field and ultra high vacuum environments, Nuclear Magnetic Resonance, X-ray, electron and optical based metrology, and advanced growth, deposition and etching.

Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. Its products, expertise, and ideas address global issues such as energy, environment, security and health.

About Oxford Instruments Plasma Technology

Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures. Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition and the controlled growth of nanostructures.

These solutions are based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, atomic layer deposition, deep silicon etch and physical vapour deposition. Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.

About the LCN

The London Centre for Nanotechnology, a joint venture between UCL and Imperial College London, is a multidisciplinary enterprise operating at the forefront of science and technology. www.london-nano.com

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