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New Compact SIMS to Launch at Vacuum Expo 2014

Hiden is pleased to announce the launch of the Compact SIMS, a design breakthrough for surface analysis, at Vacuum Expo 2014, 15th & 16th October Ricoh Arena, Coventry UK. Visit them at Booth V10.

The Compact SIMS tool is designed for fast and easy characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table. The ion gun geometry is optimised to be ideal for nanometre depth resolution and near surface analysis.

A rotary carousel enables 10 samples to be simultaneously loaded for measurement into the dry-pumped vacuum chamber. The instrument has a small footprint and is exceptionally easy to use, it boasts the same control software and ion gun system as the fully featured Hiden SIMS Workstation family, providing depth profiles, 3D and 2D images and mass spectral data. The MAXIM-600P detector is based around the highly reliable Hiden 6mm triple quadrupole mass filter with pulse ion detection. An electron gun option is available for analysis of insulating samples.

In addition to SIMS, the Compact SIMS has an SNMS facility that is useful for quantification of high concentration elements, such as alloys.

New Compact SIMS


  • Solar cells
  • Glass coatings
  • Metallic thin films


  • Small footprint
  • Easy user friendly layout
  • Positive SIMS and SNMS
  • Depth Profiling
  • 3D characterisation and imaging
  • Mass spectra
  • Isotopic analysis
  • Analysis on the nanometre scale

For further information on this or any other Hiden Analytical products visit the Hiden Analytical Booth V10 at Vacuum Expo 2014 or contact Hiden Analytical at: [email protected] or visit the main website at


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