Semiconductor/Wafer Metrology Tools RSS Feed - Semiconductor/Wafer Metrology Tools

With electronics getting smaller and smaller the demands on semiconductor manufacturers are increasing. To ensure the quality and consistency of substrates, wafer manufacturers employ metrology tools to control the quaility of their materials. Metrology tools for the semiconductor industry may include a variety of technologies and instruments such as wafer probes, AFMs, SEMs, profilometers and ellipsometers.
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Featured Equipment
cyberTECHNOLOGIES offers an advanced non-contact surface metrology system called cyberSCAN VANTAGE 2.
Semilab has developed research and development tools for a wide range of applications in semiconductor, material sciences, and photovoltaic research.
Other Equipment
The FRT MicroProf® TTV is a metrology tool for surface and thickness measurements of wafers or similar products. Parts up to 300 mm diameter are measured with a resolution of 10 nm for the thickness measurement. Surface roughness and 3D structures can be measured on both specimen sides simultaneously.
MTI Instruments offers Proforma 300SA, a semi-automated metrology system employed in thickness measurement for semi-insulating and semiconducting wafer materials.
The new FRT MHU Automated Wafer Metrology and Measurement Tool is a multi-cassette wafer metrology tool for the fully automated inspection of wafers. The tool accepts wafers from 2” up to 8” in diameter and has been designed from ground-up to accommodate the latest metrology workflow and standard requirements in the wafer fab. All components harmonize perfectly to assure superior uptime, throughput and precision.
The TriPhemos Time-Resolved Imaging Emission Microscope is suitable for analyzing the circuit timing by detecting the faint light which is generated when CMOS transistors operate using a two-dimensional infrared detector, thus analyzing the device timing with picosecond precision.
CAMECA's new generation Shallow Probe: the metrology solution for advanced integration of new processes.
This sophisticated, flexible wafer metrology system combines a MicroEpsilon profilometer with a high-performance, high-resolution vision system and laser interferometers to detect and measure laser-cut features on one side of a wafer relative to features on the other side of the wafer.
Semi-automated wafer characterization system for determining wafer thickness, TTV, bow warp, site and global flatness measurement. The Proforma 300SA can be used for all wafer materials and accommodates 200mm and 300mm wafer diameters.
Imina Technologies offers miBot BT-10, the smallest nanometer resolution manipulator available on the market. The use of piezo actuators in an innovative mobile motion technology makes the miBot highly accurate and easy to control.
Bruker’s LumiMap Electroluminescence System is a reliable and accurate metrology system and designed for HB-LED epitaxial inspection for R&D and production.
The Proforma 300i wafer metrology system supplied by MTI Instruments is a manual, non-contact measurement system designed to measure wafers up to 300mm in diameter for both thickness and total thickness variation (TTV).
Hamamatsu offers the iPhemos-SD Inverted Emission Microscope which is suitable for docking with different types of testers.
THEMOS mini is a thermal emission microscope which is designed by Hamamatsu. It is suitable for indicating the occurrence of failures in the semiconductor device by displaying the detected thermal image superimposed onto the pattern image.
Hamamatsu offers the IR-OBIRCH Analysis System which is a semiconductor failure analyzer.
The Phemos-200 developed by Hamamatsu is an emission microscope which consists of a high-resolution, cooled CCD camera with a pixel of about 1024×1024.