Trace Oxygen and Moisture Measurement for the Semiconductor Industry

The challenge of high costs and product yield has garnered significant attention from semiconductor manufacturers.

Various factors influence product yield, with contamination being one of the most critical. Industry experts estimate that contamination accounts for approximately 50% of production loss. Impurities present in specialty semiconductor process gases can adversely affect the yield and performance of final electronic devices.

Consequently, the semiconductor industry necessitates continuous monitoring of bulk nitrogen, argon, hydrogen, oxygen, helium, and carbon dioxide to identify undesirable contaminants, particularly oxygen and moisture, before they compromise wafer quality.

Trace Oxygen and Moisture Measurement for the Semiconductor Industry

Image Credit: ASTG

The Solution

ASTG offers a comprehensive range of fixed gas analytical systems. These systems can be utilized for spot-checking manufacturing issues as well as for "battery-limit" testing of entire facilities.

ASTG’s systems are engineered using ultra-high purity engineering techniques, which are innovated by ASTG scientists and engineers to meet the complex requirements of customers.

Trace Oxygen and Moisture Measurement for the Semiconductor Industry

Image Credit: ASTG

Portable Task Specific Carts Systems — for Verification & Validation

Key Features

  • Moisture + Oxygen
  • On-Board support gas systems
  • PLC Control with HMI Features
  • N2, Ar, O2, He, H2, CO2, and Spec Gases

Advantages

  • Low volume, zero dead-leg sample system
  • Electro-polished and orbitally welded
  • Class 1 Division 1 and 2 are available
  • Onboard control and data acquisition
  • Onboard life and hazard safety systems
  • Easy start-up and maintenance

Trace Oxygen and Moisture Measurement for the Semiconductor Industry

Image Credit: ASTG

Image

This information has been sourced, reviewed and adapted from materials provided by ASTG.

For more information on this source, please visit ASTG.

Citations

Please use one of the following formats to cite this article in your essay, paper or report:

  • APA

    ASTG. (2025, May 14). Trace Oxygen and Moisture Measurement for the Semiconductor Industry. AZoM. Retrieved on May 14, 2025 from https://www.azom.com/article.aspx?ArticleID=24399.

  • MLA

    ASTG. "Trace Oxygen and Moisture Measurement for the Semiconductor Industry". AZoM. 14 May 2025. <https://www.azom.com/article.aspx?ArticleID=24399>.

  • Chicago

    ASTG. "Trace Oxygen and Moisture Measurement for the Semiconductor Industry". AZoM. https://www.azom.com/article.aspx?ArticleID=24399. (accessed May 14, 2025).

  • Harvard

    ASTG. 2025. Trace Oxygen and Moisture Measurement for the Semiconductor Industry. AZoM, viewed 14 May 2025, https://www.azom.com/article.aspx?ArticleID=24399.

Ask A Question

Do you have a question you'd like to ask regarding this article?

Leave your feedback
Your comment type
Submit

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.