SU5000 Versatile, Analytical Variable Pressure FE-SEM

The SU5000 is a high resolution, analytical, variable pressure SEM with a focus on ease-of-use, flexibility and high throughput.

   Imaging performance

• Image any kind of sample easily using the field-free optics and variable pressure
• Up to 4 signals in parallel for morphology, topography, chemistry and crystallography
• Understand crystallography and composition using the angularly selective BSE detector

(1) ECCI: dislocations of lattice in steel; (2) Sandstone, uncoated, low vacuum; (3) Cryo: sugar cane cross-section.

(1) ECCI: dislocations of lattice in steel; (2) Sandstone, uncoated, low vacuum; (3) Cryo: sugar cane cross-section.


Simple specimen handling

• Fast sample exchange through the front door or with the optional load lock
• Quick, risk-free navigation using color navigation image and stage protection systems
• Automatically image large sample areas over multiple fields of view
• Add in-situ substages for dynamic experiments (mechanical , environmental, etc.)

Clean and flexible vacuum system

• Switch to variable pressure at any time with just a click
• No restriction in field of view or probe current when switching to variable pressure
• Keep system and samples clean with the dry vacuum system or by adding a plasma cleaner

Future proof

• Made for fast and detailed analysis using single or multiple EDS detectors, EBSD and WDS
• Image hydrated or sensitive samples using cryo cooling or Hitachi patented Ionic Liquid
• Add Cathodoluminescence (CL) for more information from minerals, photonics or pharmaceuticals


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