The Regulus8230: A Cold Field Emission Scanning Electron Microscope

The Regulus8230 from Hitachi is an ultra-high resolution cold-field emission SEM that has been improved for sensitive and nanostructure materials.

Image the Most Challenging Specimens

  • Sub-nanometer resolution even below 1 kV available
  • Latest multi-detection system such as energy filtering
  • High contrast imaging at ultra-low dose available with the immersion lens detection system
  • Comprehend internal sample data with angular adjustable HAADF, ADF and BF

The Regulus8230: A Cold Field Emission Scanning Electron Microscope

Image Credit: Hitachi High-Tech Europe

Advanced Nanoanalysis

  • Optimized for annular or windowless EDS detectors, providing superior light element analysis
  •  Superfast, high sensitivity EDS can be achieved with the help of annular detectors with a solid angle of greater than 1 sr

The Regulus8230: A Cold Field Emission Scanning Electron Microscope

Image Credit: Hitachi High-Tech Europe 

Rapid Sample Handling

  • Quick sample exchange provided via load lock for up to 200 mm diameter samples
  • Users can easily navigate on their sample or holder to determine the proper region of interest with the help of acquired SEM images or color optical image

Powerful Automation Tools

  • Volume microscopy with the help of automated array tomography
  • Automate complicated or repetitive procedures with most sophisticated scripting
  • Precise, calibrated dimension measurements with the help of CD-SEM algorithms
  • Users can automatically image huge sample areas over multiple fields of view

Future Proof

  • Load encapsulated oxidation sensitive specimens (such as Lithium battery components) under inert-gas or vacuum settings
  • Image hydrated or sensitive samples using Hitachi’s patented Ionic Liquid or a cryo stage
  • CL can be added for more data from pharmaceuticals, photonics, or minerals

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