Oxford Instruments has achieved a significant milestone this month with the sale of its 400th system into the HBLED market with the receipt of a multi-tool order from China’s largest HBLED manufacturer, confirming the company’s position as a leading supplier of plasma etch and deposition tools into this exciting market.
‘It gives me a great sense of achievement to say that we have helped to enable the HBLED revolution” says Dan Ayres, Managing Director of Oxford Instruments Plasma Technology, “Our systems play a vital role in manufacturing HBLEDs, and we have served the industry as it has developed from its R&D roots into the global industry it is today.” Ayres continued “We have been able to offer systems for high performance every step of the way, developing our tools to match customer demands as the market has evolved. Our PlasmaPro range of systems offers both batch and single wafer solutions to manufacturers, using the latest technologies available, developed by our expert technology and applications teams.”
Oxford Instruments produces plasma equipment for etching of Sapphire and GaN and also PECVD tools for depositing the dielectric layers essential for the finished HBLED devices. The high performance systems match Oxford Instruments’ customer needs, delivering the best cost of ownership and high throughput that is critical for the next stage of the HBLED story, Solid State Lighting.
Oxford Instruments is exhibiting its HBLED capabilities at the Strategies In Light exhibition this week in Frankfurt.
About Oxford Instruments Plasma Technology
Oxford Instruments Plasma Technology provides a range of high performance, flexible tools to semiconductor processing customers involved in research and development, and production.