Examination of Effectiveness of Henniker Plasma Cleaner using a Holey Carbon Film by TEM

HPT-100 Plasma Cleaner

Image credit: Henniker Scientific

Plasma Cleaning Method

This article discusses the effectiveness of the Henniker HPT-100 Plasma Cleaner at cleaning samples for TEM. It has a continuously variable power output from 0-100 W and dual digital MFC gas mixing. This equipment was used along with the Jeol TEM sample holder adapter that allowed samples to be introduced via the front feedthrough adapter and to be cleaned using an Ar:O2 95:5 mixture. The process operated at low power (20 W and 50 W) and in 30 second time steps. The results of the accumulated treatment time are presented and discussed in a later section.

Preparation and Examination Methods

Samples were mounted on a holey carbon coated Cu TEM grid that allowed high magnification examination in the JEM 2800 (Scanning) Transmission Electron Microscope. The samples were measured in bright-field mode as well as High magnification lattice resolution imaging mode, both of which used the CCD. The instrument parameters were a voltage of 200 kV and the C2 aperture at 70 and 40 µm.

Analysis region

Image credit: Henniker Scientific

The images show the cleaning progression for a selected thinned analysis region. As can be seen, there is a gradual loss of carbon from the region which is then followed by a gradual loss from the thicker walled regions.

progression for a selected thinned analysis region

progression for a selected thinned analysis region

Image credit: Henniker Scientific

Conclusion

This study has proven how effective the Henniker Plasma cleaner is at performing plasma treatments with different times and power levels.

The images show the thinned carbon being removed, and then the thicker walls were observed to be losing carbon from the edges. All the images were taken from the same location using a finder holey carbon grid and showed the gradual loss of carbon from a small thinned area of carbon.

In conclusion, the Henniker HPT plasma cleaner was observed to be suitable for TEM preparation purposes because it offers amazing control over how much carbon is removed from samples. It is suitable for catalyst samples on carbon for hydrocarbon contamination cleaning in the TEM.

Dr. Dogan Ozkaya (Johnson Matthey Technology Centre)

Acknowledgments

Henniker Plasma gratefully acknowledges the work of Dr. Dogan Ozkaya and the talented Microscopy group members of Johnson Matthey Technology Centre who provided the detailed analyses presented in this note.

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This information has been sourced, reviewed and adapted from materials provided by Henniker Plasma.

For more information on this source, please visit Henniker Plasma.

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