Equipment | Physical Properties Testing |Plasma Processing Equipment

Plasma Processing Equipment

Plasma processing equipment is widely used in microelectronic industries in order to produce thin film deposition and etching. Plasma processing applications typically involve either a direct or alternating current source provided by a generator. With applications in flat panel display fabrications, plasma spray, and micro discharge, plasma processing techniques are used for both the development of new equipment, as well as for diagnostic purposes. Plasmas are essential for the deposition of thin layers of dielectric materials, such as silicon dioxide and silicon nitride, which are used for the insulation of conducting films as well as the encapsulation and protection of circuits from moisture and contamination.

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